基于立体视觉的IGBT针高检测

Height Inspection of IGBT Pins Based on Stereovision

针对现有绝缘栅双极晶体管(IGBT)的pin针高度测量系统不能稳定、可靠地测量pin针高度的问题,设计了一套基于双线激光传感器的pin针高度测量系统。双线激光传感器采用上下错高的安装布局,分别采集IGBT针尖部分和底面部分的点云数据。同时,基于双线激光传感器采集的点云数据开发了一套测量pin针高度的测量程序。分别使用随机抽样一致性(RANSAC)算法处理基准面点集的离群点,使用多步去噪算法处理精确点集。实验结果表明,该系统的测量重复度小于0.04 mm,且极差分布在(0.021 mm,0.039 mm)的概率超过99.7%,有着良好的稳定性和可靠性。

Aiming at the problem that existing pin-height measurement system for insulated gate bipolar transistors(IGBTs)cannot measure the pin-height stably and reliably,a pin-height measurement system based on a dual-line laser sensor is designed.The dual-line laser sensor adopts an up and down staggered-height mounting layout to collect point cloud data from the tip part and the bottom part of the IGBT pin needles respectively.At the same time,a measurement program for pin-height measurement is developed based on point cloud data collected by the dual-line laser sensor.The outliers in the datum point set are treated using the randomised sampling consistency(RANSAC)algorithm and the exact point set is treated using a multi-step denoising algorithm respectively.The experimental results show that the measurement repeatability of the system is less than 0.04 mm,and the probability of the polar distribution at(0.021 mm,0.039 mm)is more than 99.7%.The system has good stability and reliability.