高精密多极磁感应角位移传感器校正方法的技术研究

Technical Research on Calibration Method of High-Precision Multi-Pole Magnetic Induction Angular Displacement Sensor

高精密多极磁感应角位移传感器精度通常为±(3~5)″,很难达到±1.5″以内,这限制了其应用在一些高精尖的精密测试及制造领域,为实现更高精度则需对系统进行软件校正,目前常用的软件校正方法有查表法、神经网络法、小波分析法等,但这些校正方法需要采集大量连续的误差标定数据,而满足此精度等级、能实现连续化误差标定的测角装置极难获取,而23面(或24面)棱体与光电自准直仪组成的测角标定装置虽可满足精度要求,但它只能实现360°内离散化误差标定,基于多面棱体与光电自准直仪有限离散的误差标定数据,在此基础上提出一种二次精度校正技术以实现对角位移测量系统的软件修正,实验证明,应用此方法后,角位移测量系统精度由±3.1″提升到了±1.35″,从而验证了所提出的误差校正技术。

The accuracy of high-precision multi-pole magnetic induction angular displacement sensor is usually±(3~5)″,which is difficult to reach within±1.5″,limiting its application in some high-precision testing and manufacturing fields.In order to achieve higher accuracy,the system needs to be calibrated by software.At present,the commonly used software calibration methods include table lookup method,neural network method,wavelet analysis method,etc.,but these calibration methods need to collect a large amount of continuous error calibration data,The angle measuring device that meets this accuracy level and can achieve continuous error calibration is extremely difficult to obtain.Although the combination of a 23-prism(or 24-prism)and a photoelectric autocollimator can meet the accuracy level,it can only achieve discrete error calibration within 360 degrees.Based on the limited discrete error calibration data,a secondary accuracy correction technique is proposed to realize the software correction of the angular displacement measuring system.The experiment shows that the accuracy of the angular displacement measuring system is improved from±3.1″to±1.35″after the application of this method,thus verifying the error correction technique proposed.