高真空分子泵驱动实验分析

Research and Experimental Analysis of High Vacuum Molecular Pump Driving Technique

研究低粒子阀粒度检测平台使用的小型复合分子泵驱动技术,设计分子泵驱动器的关键硬件电路并在实验平台对控制方法进行验证以实现分子泵的稳定驱动。采用无位置传感器的永磁无刷直流电机作为高真空分子泵的动力源,在现有的电机驱动和停机控制策略上应用转子位置预定位方法及转子位置检测的线反电势过零法。研究设计得到了一种适用于高转速真空泵驱动领域的高真空分子泵驱动方法,实现了分子泵的稳定驱动。

Aiming at the stable driving of the molecular pump,this paper studies the small composite molecular pump driving technology used in the low particle valve particle size detection platform,designs the key hardware circuit of the molecular pump driver,and verifies the control method on the experimental platform.The permanent magnet brushless DC motor without position sensor is used as the power source of the high vacuum molecular pump,and the rotor position pre-positioning method and the line back-EMF zero-crossing method of rotor position detection are adopted to the existing control strategies of motor driving and shutdown.In this research,a high-vacuum molecular pump driving technique suitable for high-speed vacuum pump is obtained,which realizes the stable driving of the molecular pump.