硬脆材料超精密磨削技术研究进展综述

State-of-the-art of Ultra-precision Grinding Technology for Hard and Brittle Materials

硬脆材料因其优异的物理与化学性质广泛应用于5G通讯、航空航天、电子电力等领域,高效率的超精密磨削技术是其加工流程中的重要一环。为了提高硬脆材料加工质量,需要对超精密磨削技术进行系统化的深入研究。本文从超精密磨削装备设计优化的角度出发,对自旋转磨削、双面磨削和磨抛一体化3种磨削方法的原理与机床设备进行了详细说明,介绍了超硬磨粒砂轮的制备、砂轮磨损检测与分析、砂轮修整技术的研究进展;从压痕/划痕实验、纳米磨削实验、模拟仿真分析3个角度对硬脆材料的磨削机理进行了深入探索;进一步总结了硬脆材料表面粗糙度及表面形貌、亚表面损伤、面形精度的控制方法。分析了硬脆材料超精密磨削的重点研究方向与发展趋势,为后续硬脆材料超精密磨削技术的研究提供了指导。

Hard and brittle materials are extensively utilized in various fields,such as 5G communication,aerospace,and electronic power,owing to their exceptional physical and chemical properties.High-efficiency ultraprecision grinding technology plays a crucial role in their processing.Conducting systematic and thorough research on ultra-precision grinding technology is essential to enhance the processing quality of these materials.A detailed description is presented for three grinding methods:self-rotating grinding,double-sided grinding,and grindingpolishing integration,from the perspective of designing and optimizing ultra-precision grinding equipment.Furthermore,research progress is introduced on the preparation,wear detection,and dressing of super-hard abrasive grinding wheels.A thorough analysis is also provided of the grinding mechanism of hard and brittle materials,considering aspects such as indentation and scratch,nano-grinding,and simulation analysis.The control methods for surface roughness,surface morphology,subsurface damage,and surface shape accuracy of hard and brittle materials are also summarized.