不锈钢双极板用C/Cr复合薄膜原位石墨化调控

In-situ graphitic regulation of C/Cr composite film for stainless steels bipolar plates

为了在不锈钢双极板上沉积导电耐蚀的防护型薄膜,采用等离子体增强化学气相沉积复合磁控溅射技术,以温度为变量,在304不锈钢表面沉积掺铬类石墨(Cr-GLC)多层薄膜,并进行原位石墨化调控。实验结果表明,随着制备温度升高,薄膜有一定石墨化倾向,薄膜接触电阻降低,自腐蚀电位升高,薄膜与基体结合良好。395℃制备的Cr-GLC薄膜接触电阻低至17 mΩ·cm~2,自腐蚀电位为173.3 mV,具有良好的综合性能。

To deposit conductive and corrosion-resistant protective films on stainless steel bipolar plates,chromium-doped graphite(Cr-GLC)multilayer films were deposited on 304 stainless steel surface by plasma enhanced chemical vapor deposition and magnetron sputtering technology,and the in situ graphitization was controlled.The experiment results show that with the increase of preparation temperature,the film has a certain tendency of graphitization,the contact resistance of the film decreases,the self-corrosion potential increases,and the film and the matrix bond well.The contact resistance of Cr-GLC films prepared at 395 ℃ is as low as 17 mΩ·cm~2,and the self-corrosion potential is 173.3 mV,which has good comprehensive properties。