SiC外延炉模块化集成制造技术探索与研究

Exploration and Research on Modular Integrated Manufacturing Technology for SiC Epitaxial Furnace

SiC外延炉是半导体行业中的一项重要设备,其主要作用是在衬底上生长出高品质、大面积、无杂质的SiC外延薄膜。简要介绍了SiC外延炉模块化集成制造技术,并通过实施模块化集成制造技术方案,解决了设备生产周期长的问题,有效地降低了制造成本。

SiC epitaxial furnace is an important equipment in semiconductor industry,its main function is to grow high-quality,large-area,and impurity free SiC epitaxial films on the substrate.The modular integrated manufacturing technology of SiC epitaxial furnace is briefly introduced in this paper,and by means of the implementation of modular integrated manufacturing technology solutions,solving the problem of long equipment production cycle,and effectively reducing manufacturing costs.