机器视觉检测系统对准误差分析研究

Research on Alignment Error of Machine Vision Inspection System

针对视觉检测系统大视场、高分辨率、高对准精度等指标需求,建立了一套普遍适用的精度分析模型,识别检测系统误差来源,获取关键部件性能参数,作为光学设计、机械设计、算法设计、光机集成的重要依据。经测试,系统实际定位精度、重复精度均处于精度预算以内,方便分析并解决生产中出现的问题,证实了精度分析模型的可行性,也为更高精度的视觉检测系统提供了有效的研究方法。

For the purpose of large field of view,high resolution,and high alignment accuracy of machine vision inspection system,a set of generally applicable precision analysis model is established,which identify the error of the detection system.Also,the model is the important basis for the optical design,mechanical design,algorithm design,integration.After testing,system accuracy is higher than budget,which is beneficial for analyzing and solving production problems.This confirms feasibility of the model and provides an effective research method for higher precision visual detection systems.