摘要
Dual-metal gate and gate–drain underlap designs are introduced to reduce the ambipolar current of the device based on the C-shaped pocket TFET(CSP-TFET).The effects of gate work function and gate–drain underlap length on the DC characteristics and analog/RF performance of CSP-TFET devices,such as the on-state current(I_(on)),ambipolar current(I_(amb)),transconductance(g_(m)),cut-off frequency(f_(T))and gain–bandwidth product(GBP),are analyzed and compared in this work.Also,a combination of both the dual-metal gate and gate–drain underlap designs has been proposed for the C-shaped pocket dual metal underlap TFET(CSP-DMUN-TFET),which contains a C-shaped pocket area that significantly increases the on-state current of the device;this combination design substantially reduces the ambipolar current.The results show that the CSP-DMUN-TFET demonstrates an excellent performance,including high I_(on)(9.03×10^(-4)A/μm),high I_(on)/I_(off)(~10^(11)),low SS_(avg)(~13 mV/dec),and low I_(amb)(2.15×10^(-17)A/μm).The CSP-DMUN-TFET has the capability to fully suppress ambipolar currents while maintaining high on-state currents,making it a potential replacement in the next generation of semiconductor devices.
作者
赵梓淼
陈子馨
刘伟景
汤乃云
刘江南
刘先婷
李宣霖
潘信甫
唐敏
李清华
白伟
唐晓东
Zi-Miao Zhao;Zi-Xin Chen;Wei-Jing Liu;Nai-Yun Tang;Jiang-Nan Liu;Xian-Ting Liu;Xuan-Lin Li;Xin-Fu Pan;Min Tang;Qing-Hua Li;Wei Bai;Xiao-Dong Tang(College of Electronics and Information Engineering,Shanghai University of Electric Power,Shanghai 200090,China;Semiconductor Manufacturing International Corporation,Shanghai 201203,China;Radiwave Technologies Corporation Limited,Shenzhen 518172,China;Key Laboratory of Polar Materials and Devices,East China Normal University,Shanghai 200041,China)
基金
Project supported by the National Natural Science Foundation of China(Grant Nos.52177185 and 62174055)。