基于Nelder-Mead算法的PVD加热器结构优化

Structure Optimization of PVD Heater Based on Nelder‑Mead Algorithm

为提高蒸发镀膜机内基板温度均匀性,以蒸发镀膜机为研究对象进行建模,采用COMSOL有限元软件对真空环境下的基板加热器温度场进行有限元仿真,并耦合PID算法用于温度控制,揭示了基板温度分布规律。在此基础上对基板温度均匀性的影响因素进行研究,并借助Nelder-Mead单纯形法对加热系统进行优化。结果表明,当顶加热丝间距与侧加热丝间距为1∶1.23、加热距离为440 mm、反射距离为3.56 mm时,基板表面最大温差由优化前的16.5℃降低至9.9℃,温度均匀性得到改善。最后,结合实测数据分析显示,仿真结果与实测数据误差为6%,验证了优化的有效性。

In order to further improve the temperature uniformity of the substrate in the evaporation coating machine,this paper takes the evaporation coating machine as the research object to model.COMSOL finite element software is used to simulate the temperature field of substrate heater in vacuum environment,and PID algorithm is coupled for temperature control,which reveals the temperature distribution law of substrate.On this basis,the influencing factors of substrate temperature uniformity are further studied,and the heating system is optimized by Nelder-Mead simplex method.The results show that when the distance between the top heating wire and the side heating wire is 1∶1.23,the heating distance is 440 mm,and the reflection distance is 3.56 mm,the maximum temperature difference on the substrate surface is reduced from 16.5℃to 9.9℃compared with that before optimization,and the temperature uniformity is improved.Finally,combined with the analysis of measured data,it shows that the error between simulation results and measured data is 6%,which verifies the effectiveness of optimization.