高纯八氟环丁烷的制备与纯化

Preparation and Purification of High-purity Octafluorocyclobutane

在常温下,八氟环丁烷是一种无毒气体,具有较低的温室效应指数和适宜比例的碳/氟比,被广泛用作制冷剂以及半导体芯片制造工艺中的蚀刻剂和清洗剂。随着低纳米制程芯片的飞速发展,对八氟环丁烷纯度的要求越来越严苛,给高纯八氟环丁烷的纯化工艺带来了极大挑战。综述了现阶段八氟环丁烷的制备方法和纯化方法:(1)工业上广泛用于合成八氟环丁烷的方法是四氟乙烯二聚法;(2)八氟环丁烷的纯化方法包括精馏、吸附、化学转化和膜分离。通过单一的纯化方法很难得到电子级八氟环丁烷,需要多种纯化技术联合使用才能得到纯度>5N级的八氟环丁烷。

Octafluorocyclobutane is non-toxic gas with low greenhouse effect index and appropriate carbon/fluorine ratio,which is widely used as refrigerant,etching agent and cleaning agent in semiconductor manufacturing industry.The requirement for the purity of electric-grade octafluorocyclobutane has become stricter and stricter as the rapid development of low nanometer process chips,that brought a great challenge to the purification process of high-purity octafluorocyclobutane.It summarizes the preparation and purification methods to octafluorocyclobutane at current period:(1)the tetrafluoroethylene dimerization is widely used to synthesize octafluorocyclobutane in industry;(2)the purification technology for octafluorocyclobutane involve distillation,adsorption,chemical conversion and membrane separation.The combination of multiple purification technologies is required to obtain high-purity octafluorocyclobutane(purification>5N),due to difficult to obtain electric-grade octafluorocyclobutane by single purification method.