先进半导体制程项目配电系统方案可靠性评估及成本分析

Reliability A ssessment and Cost Analysis of Distribution System Schemes for Advanced Semiconductor Process Projects

基于实际工程案例,提出3种先进半导体制程项目配电系统设计方案,通过电力电气分析软件ETAP进行3种配电系统方案的可靠性对比与评估,并结合系统成本分析,最终给出满足配电系统可靠性要求的推荐设计方案。

Based on practical engineering cases,three distribution system design schemes for advanced semiconductor process projects areproposed.1.The reliability comparison and a assessment of the three distribution system schemes are achieved through the power electrical analysis software ETAP.Combined with system cost analysis,a recommended design scheme that meets the reliability requirements of the distribution system is finally proposed.