Bi_(2)O_(3)掺杂Ba_(0.85)Ca_(0.15)(Zr_(0.1)Ti_(0.88)Mn_(0.02))O_(3)压电陶瓷及微型气泵的制备与性能研究

Preparation and Properties Study of Bi_(2)O_(3) Doped Ba_(0.85)Ca_(0.15)(Zr_(0.1)Ti_(0.88)Mn_(0.02))O_(3) Piezoelectric Ceramics and Micro Air Pump

采用固相法制备了Bi_(2)O_(3)掺杂的Ba_(0.85)Ca_(0.15)(Zr_(0.1)Ti_(0.88)Mn_(0.02))O_(3)压电陶瓷,研究了体系的微观结构,以及Bi_(2)O_(3)掺杂量对体系压电性能的影响;将体系最优性能的样品装配成微型气泵,并与日本村田的MZB1001T02微型泵进行了性能对比。研究表明,Bi_(2)O_(3)掺杂Ba_(0.85)Ca_(0.15)(Zr_(0.1)Ti_(0.88)Mn_(0.02))O_(3)的无铅压电陶瓷呈单一的钙钛矿结构,少量的Bi_(2)O_(3)掺杂使体系保持了三方-四方相共存的特性。当掺杂量(质量分数)为0.05%时,样品晶粒分布均匀,介电和压电性能最优,即ε^(T)_(33)=5 289、k_(p)=0.46、d_(33)=377pC/N、tanδ=0.72%、T_(c)=80℃,样品具有典型的介电弛豫特性。将上述样品装配在微型气泵中,在输入频率(25±2)kHz、输入电压15V条件下,测得微型气泵的气压略低于日本村田的微型泵。在某些对气压要求不高的领域,样品能够满足使用要求。

The Bi_(2)O_(3)doped Ba_(0.85)Ca_(0.15)(Zr_(0.1)Ti_(0.88)Mn_(0.02))O_(3)piezoelectric ceramics were prepared by solid state method,the microstructure of the system and the effect of Bi_(2)O_(3)doping amount on the piezoelectric properties of the system were studied.The sample with the best performance of the system was assembled into a micro air pump and compared its performance with the MZB1001T02micro air pump from Murata,Japan.The results show that the lead-free piezoelectric ceramics of Bi_(2)O_(3)doped Ba_(0.85)Ca_(0.15)(Zr_(0.1)Ti_(0.88)Mn_(0.02))O_(3)exhibit a single perovskite structure,and a small amount of Bi_(2)O_(3)doping makes the system keep the coexistence of trigonal phases and tetragonal phases.When the doping amount is 0.05wt%,the distribution of grains is uniform and the dielectric and piezoelectric properties of the samples are the best,i.e.ε~T_(33)=5 289,k_p=0.46,d_(33)=377pC/N,tanδ=0.72%、T_c=80℃,and the sample exhibits typical dielectric relaxation characteristics.The above sample was assembled into the micro air pump,and under the conditions of input frequency of(25±2)kHz,input voltage of 15V,the measured air pressure of the micro air pump was slightly lower than that of the micro-pump of Murata,Japan.The sample can be applied to some areas of low pressure requirements.