高温压电加速度传感器设计与仿真优化

Design and Simulation Optimization of High-Temperature Piezoelectric Accelerometers

高温压电加速度传感器被广泛应用于振动与冲击测试、故障诊断与监测方面。针对传统压电加速度传感器灵敏度温度漂移过大的问题,该文设计了一种高温压电加速度传感器,该加速度传感器采用正负温度系数的压电元件堆叠设计,以抵消温度变化的影响,进而降低温度漂移。5层YCOB压电元件和1层GdCOB压电元件堆叠构成压缩型压电加速度传感器。应用ANSYS对传感器的性能进行仿真优化,并对提出的降低灵敏度温度漂移的方法有效性进行了仿真验证。结果表明,在常温~800℃全温度范围内,该传感器的灵敏度温度漂移小于±3%,其具有高温稳定性好、测量精度高的优点。

The high temperature piezoelectric accelerometers are widely used in vibration and impact testing,fault diagnosis and monitoring.In order to address the problem of excessive temperature drift in the sensitivity of conventional piezoelectric accelerometers,a high temperature piezoelectric accelerometer is designed in this paper.The accelerometer adopts a design of stacked piezoelectric elements with positive and negative temperature coefficient to counteract the effect of temperature variation and thereby reduce temperature drift.A compression-mode piezoelectric accelerometer is constructed by stacking 5 layers of YCOB piezoelectric elements and 1 layer of GdCOB piezoelectric elements.The performance of the accelerometer was simulated and optimized using ANSYS,and the effectiveness of the proposed method for reducing sensitivity temperature drift was verified through simulation.The results show that the sensitivity temperature drift of the designed accelerometer is less than ±3% over the full temperature range from room temperature to 800 ℃,and it has the advantages of good high temperature stability and high measurement accuracy.