绝对式多极磁感应角位移测量系统的技术研究

Research on Absolute Multipole Magnetic Induction Angular Displacement Measurement System

多极磁感应角位移测量系统被广泛应用于精密测试及制造领域,传统的多极磁感应角位移测量系统为单通道模式,不具备绝对零位,为实现绝对零位功能可将其设计为双通道模式,但这种双通道设计模式会增加系统的体积、成本及复杂性。提出了一种集成光电传感器的新型绝对零位测角方案,这种方案创新性地将光电传感器与多极磁感应角位移测角系统在结构上进行了集成,通过将光电传感器安置在多极磁感应角位移测角系统的某一个对极空间内,巧妙地利用光电传感器触发特性将这个对极的零位作为系统的绝对零位,从而避开了光电传感器重复性不高的缺陷,得以实现高重复精度的绝对零位。重点论述了零位功能及信号调理部分的技术路线,并构建了实验测试平台对零位功能及重复性进行了验证,实验测试绝对零位的重复性误差不超过0.1″,随后对系统测角精度进行标定可达到±2.7″,进而验证了本文所涉及绝对零位及高精度测角方案的可行性。

The multipole magnetic induction angular displacement measurement system is widely used in the field of precision testing and manufacturing.The traditional multipole magnetic induction angular displacement measurement system adopts a single-channel mode and does not have absolute zero position.In order to achieve the absolute zero position function,it can be designed as a dual-channel mode,but this dual-channel design mode will increase the volume,cost and complexity of the system.A new absolute zero position angle measurement scheme with integrated photoelectric sensor is proposed.This scheme innovatively integrates the photoelectric sensor and the multipolar magnetic induction angular displacement angle measurement system in the structure.By placing the photoelectric sensor in a certain polar space of the multipolar magnetic induction angular displacement angle measurement system,the trigger characteristics of the photoelectric sensor is ingeniously used to take the polar zero position as the absolute zero of the system,Thus,the defect of low repeatability of photoelectric sensor is avoided and the absolute zero position with high repeatability is realized.The technical route of the zero position function and signal conditioning part is focused on,and an experimental test platform is constructed to verify the zero position function and repeatability.The repeatability error of the absolute zero position in the experimental test is not more than 0.1″,and then the system angle measurement accuracy can be calibrated to±2.7″,thus verifying the feasibility of the absolute zero position and high-precision angle measurement scheme involved.