移相干涉测量中的抗振技术综述

Review of Anti-Vibration Technology in Phase-Shifting Interferometry

移相干涉术是一种高灵敏度的非接触式光学测量方法。该方法在光学表面测量、形变测量等许多方面被广泛应用。然而环境振动对该方法的测量结果可能产生不可忽视的影响,包括造成条纹抖动、干涉图模糊等现象。为了解决这个问题,提高移相干涉测量结果的稳定性,干涉测量中的抗振技术应运而生。本文将抗振技术分为主动与被动两大类,主动抗振旨在隔振,即削弱传播至干涉系统的振动信号强度;被动抗振旨在消振,即消除振动对干涉测量造成的影响。被动抗振技术种类繁多,本文从帧数和实时性两个方面出发,将已有的被动移相干涉抗振技术进行分类介绍并对比,并对移相干涉测量抗振技术的发展方向进行了阐述。

Phase-shifting interferometry is a noncontact optical measurement method with high sensitivity.This method is widely used in optical surface and deformation measurements.However,environmental vibrations can have a significant influence on the obtained measurement results,producing fringe jitter and interference pattern ambiguity.To address these issues and improve the stability of phase-shifting interferometry,the anti-vibration technique can be used.In this article,the anti-vibration technology is divided into active and passive categories.Active anti-vibration is used for vibration isolation,that is,weakening the intensity of the vibration signal transmitted to the interference system.Passive antivibration is used to eliminate the influence of vibration on interferometry.Several types of passive anti-vibration technologies have been developed so far.In this article,existing passive phase-shifting interference anti-vibration technologies are classified and compared with respect to the frame number and real-time performance.Furthermore,the development direction of phase-shifting interference measurement anti-vibration technology is discussed.