镓基液态金属柔性叉指阵列电容传感器设计及实验测试

Design and Experimental Test of Flexible Interdigital Array Capacitor Sensor Based on Gallium Based Liquid Metal

为解决传统叉指电容传感器采用铜和印制电路板打印制备无柔性、难以贴合不平整被测物表面等问题,提出了基于镓基液态金属的柔性叉指阵列电容传感器设计方案。考虑电极层和基板的影响及叉指阵列结构的影响构建传感器数学模型,确定传感器的各项参数。利用镓基液态金属制备柔性叉指阵列传感器,对其进行实验标定和输出特性测试,并将其应用于材料材质识别研究。测试与仿真结果表明,该柔性叉指阵列电容传感器具有良好的柔性、灵敏度和输出特性,具有应用于材料材质识别的应用潜力。

In order to solve the problems of traditional interdigital capacitor sensor using copper and printed circuit board to produce non-flexible,difficult to fit uneven surface of the measured object,a design scheme of flexible interdigital array capacitor sensor based on gallium based liquid metal was proposed.Considering the influence of electrode layer,substrate and interfinger array structure,the mathematical model of the sensor was constructed and the parameters of the sensor were determined.The flexible interdigital array capacitor sensor was prepared by gallium based liquid metal,and its experimental calibration and output characteristics were tested.And it was applied to the research of material identification.The test and simulation results show that the flexible interdigital array capacitor sensor has good flexibility,sensitivity and output characteristics,and has potential application in material identification.