三十年不断发展的MEMS惯性传感器

Continuous Development of MEMS Inertial Sensors for Thirty Years

近三十年来,MEMS惯性传感器技术取得了巨大进步,在人类生活、工业和高端装备等方面得到了广泛应用。概述了MEMS惯性传感器在我国的发展历程与主要路线,并以车辆辅助驾驶为例,总结了国内外MEMS惯性传感技术的快速发展与典型应用情况,研判了MEMS惯性传感器正在向高可靠、集成化、高融合与智能化等方向加速发展。

In the past three decades,MEMS inertial sensor technology has made great progress and has been widely used in human life,industry and high-end equipment.Firstly,the development history and main routes of MEMS inertial sensor in China are summarized.Then,taking vehicle assisted driving as an example,the rapid development and typical applications of MEMS inertial sensor technology at home and abroad are summarized,and the accelerating development of MEMS inertial sensor are analyzed in the direction of high reliability,integration,high fusion and intelligence.