不同气氛热冲击下Al:WS_(2)薄膜摩擦学性能的响应机理

Response Mechanism of Tribological Properties of Al:WS_(2) Film under Different Ambient Thermal Shock

采用磁控溅射技术制备了Al:WS_(2)薄膜。为考查不同气氛热冲击下Al:WS_(2)薄膜摩擦学性能的响应机理,采用自行研制的温度交变真空摩擦试验机开展了真空、氮气及氧气气氛的–100~+250℃的热冲击试验,并对热冲击后Al:WS_(2)薄膜结构、成分以及摩擦学性能进行了研究。研究发现,热冲击后,Al:WS_(2)薄膜柱状晶长大,S含量减少,部分WS_(2)被氧化为WO_(3),薄膜硬度增加。经氮气热冲击后,薄膜的(002)衍射峰强度明显增强,使得摩擦系数降低。经真空热冲击后,在薄膜表面形成的WO_(3)起到磨粒磨损作用,减少了薄膜寿命;经氧气热冲击后,Al:WS_(2)薄膜中大量起润滑作用的WS_(2)被氧化为WO_(3),薄膜的寿命显著缩短。

Al:WS_(2) films were prepared by magnetron sputtering technology.In order to investigate the response mechanism of the tribological properties of Al:WS_(2) film under different ambient thermal shock,the thermal shock tests of–100~+250℃in vacuum,nitrogen and oxygen were carried out using the temperature altering vacuum tribometer developed,and the structure,composition and tribological properties of Al:WS_(2) films after thermal shock were mainly studied.It was found that the columnar crystal of Al:WS_(2) film grows,S content decreases,part of WS_(2) is oxidized to WO_(3),and the hardness of film increases after thermal shock.After thermal shock under nitrogen atmosphere,the intensity of(002)diffraction peak of Al:WS_(2) film is obviously enhanced,and the friction coefficient decreased.After thermal shock with vacuum,WO_(3) appears on the surface of Al:WS_(2) film plays the role of abrasive wear,which reduces the life of film.After oxygen thermal shock,a large number of WS_(2) is oxidized to WO_(3),and the wear life of the film is significantly shortened due to the serious abrasive wear.