压电梁式驱动器力电耦合特性的研究

Study on Electromechanical Coupling Performance of A Piezoelectric Microbeam Actuator

本文基于压电理论建立了压电梁式驱动器的理论模型。应用变分原理推导了压电层合梁的控制方程和边界条件。探究了压电层合梁的力电耦合性能。结果表明,输出挠度与电压成正比关系,电压越大输出挠度越高。当弹性层厚度超过压电层厚度的38倍时,可忽略压电层对力电耦合响应的影响,当压电层厚度超过弹性层厚度的38倍时,挠度不再随压电层厚度的增大而增大。因此,在设计驱动器时不能为了提高驱动性能而一味的增大压电层厚度的占比。

Based on the piezoelectric theory,a piezoelectric beam actuator is established.The governing equations and boundary conditions for the piezoelectric actuator are obtained using the variational principle.The mechanical and electrical coupling performance of the piezoelectric laminated beam is explored.The results reveal that the output deflection is proportional to the voltage,and the higher the voltage,the higher the output deflection.The thickness of the piezoelectric beam is an important factor,when the thickness of the elastic layer is greater than 38 times of the piezoelectric layer,the piezoelectric effect can be ignored.When the thickness of the piezoelectric layer is greater than 38 times of the elastic layer,the effect of the thickness on deflection is neglected.