纳秒激光刻蚀非等截面微沟槽工艺研究

Nanosecond Laser Etching of Non-Equal Section Microgrooves

为提高微沟槽吸液芯的毛细性能,采用V字扫描法在紫铜板上刻蚀非等截面微沟槽,研究激光光斑间距、扫描速度、扫描次数、脉宽和频率等工艺参数对非等截面微沟槽形貌尺寸的影响规律。研究发现,随着激光光斑间距增大,沟槽宽度也随之增大,沟槽深度呈现先增大后减小的趋势,沟槽表面粗糙度则先减小后增大;V字扫描法的路径间距在10~30μm时刻蚀出的沟槽形貌最佳且两端毛细压力差较大;当激光扫描次数为50次,扫描速度为100 mm/s,频率40 kHz,脉宽120 ns时,纳秒激光刻蚀的非等截面沟槽两端毛细压力差较大。该研究可为提高沟槽式均热板的传热性能提供参考。

To improve the capillary performance of microgroove suction core,v-shaped scanning method was used to etch nonequal section microgrooves on copper plate.The effects of laser path spacing,scanning speed,scanning times,pulse width,and frequency on the morphology and size of non-equal section microgrooves were studied.It is found that with the increase of laser path spacing,the width of grooves increases,the depth of grooves increases first and then decreases,and the roughness of grooves decreases first and then increases.When the path spacing is between 10μm and 30μm,the groove morphology is the best,and the capillary pressure difference between the two ends is large.When the number of laser scanning is 50,the scanning speed is 100 mm/s,the frequency is 40 kHz,the pulse width is 120 ns,and the capillary pressure difference between the two ends of the non-equal section groove etched by nanosecond laser is large.The research can provide reference for improving the heat transfer performance of groove type vapor chamber.