黄绿色荧光成像用环烯烃共聚物镜片减反膜的研制

Development of Cycloolefi n Copolymer Lens Anti Refl ection Film for Yellow Green Fluorescence Imaging

针对黄绿色荧光成像过程中由于发光微弱导致细节丢失的问题,以环烯烃共聚物中的F52R材料为基底镜片,采用电子束离子辅助蒸发的方法制备了可见光波段黄绿光高通型的减反膜。根据光谱使用要求,利用膜系设计软件TFCalc进行了膜系的设计和优化;通过离子源沉积工艺的优化,解决了低温镀制过程中膜层牢固度的问题。测试结果表明:当光线的入射角为5°时,400~700nm平均反射率约为0.55%,500~600nm的黄绿光平均反射率约为0.29%,光谱曲线呈现黄绿光高通的形状,满足使用要求。

In order to solve the problem of detail loss due to weak luminescence during yellow green fluorescence imaging,a yellow green high pass antireflection film was prepared by electron beam ion assisted evaporation using F52R material of Cyclic Olefin Copolymer(COC)as the substrate lens.According to the spectral usage requirements,the membrane design software TFCalc was used to design and optimize the membrane system.By optimizing the ion source deposition process,the problem of film firmness during the low-temperature plating process has been solved.The test results show that when the incident angle of the incident light is 5°,the average reflectance of 400~700 nm is about 0.55%,and the average reflectance of 500~600 nm yellow green light is about 0.29%.The spectral curve shows a high pass shape of yellow green light,which meets the usage requirements.