基于MEMS技术的微型加速度传感器设计与性能分析

Design and Performance Analysis of Micro Acceleration Sensors Based on MEMS Technology

文章针对基于MEMS技术的微型加速度传感器进行了设计与性能分析。介绍了设计过程及关键参数选择,分析了传感器的灵敏度、频率响应和噪声等性能指标。研究结果显示,所设计传感器具备优异的微小尺寸和高精度特点,适用于广泛的应用领域,如移动设备、运动监测等,为微型加速度传感器的发展与应用提供了有力支持。

This article focuses on the design and performance analysis of micro acceleration sensors based on MEMS technology.By elaborating on the design process and selecting key parameters,the sensitivity,frequency response,and noise performance indicators of the sensor were analyzed.The research results show that the designed sensor has excellent micro size and high accuracy characteristics,and is suitable for a wide range of applications,such as mobile devices and motion monitoring.This study provides strong support for the development and application of micro acceleration sensors.