摘要
提出了一种基于微纳光栅泰伯(Talbot)效应检测原理的微光机电系统(MOEMS)加速度计,通过理论分析与有限元仿真软件相结合,验证了光栅MOEMS加速度计检测机理,同时仿真得到其结构灵敏度为1.21μm/gn,工作模态频率为153.76 Hz。另外,为了提升其线性工作范围,采用电磁驱动的方式进行闭环控制。采用通电导线在磁场中产生的安培力来平衡加速度计产生的惯性力,以达到闭环反馈控制,理论上可将加速度计的线性工作范围从0.83 gn提升至4.32 gn,提升近5倍左右。
A micro-opto-electro-mechanical system(MOEMS)accelerometer based on the detection principle of nano-gratings Talbot effect is presented.Through combination of theoretical analysis and finite element simulation software,the detection principle of grating MOEMS accelerometer is verified.A structural sensitivity obtained through simulation is 1.21μm/gn and operation mode frequency is 153.76 Hz.In addition,to enhance its linear operation range,electromagnetic drive mode is used for closed-loop control.The closed-loop feedback control is achieved by balancing the inertial force with the Ampere force generated by the electrified conductor in the magnetic field,which can theoretically increase the linear operation range of the accelerometer from 0.83 gn to 4.32 gn,resulting in an approximate 5 times improvement.
作者
徐浩东
金丽
吴倩楠
王兵权
彭海峰
李孟委
XU Haodong;JIN Li;WU Qiannan;WANG Bingquan;PENG Haifeng;LI Mengwei(Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Provincial School of Instrument and Intelligent Future Technology,North University of China,Taiyuan 030051,China)
出处
《传感器与微系统》
CSCD
北大核心
2023年第12期83-86,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(62005253)。
关键词
泰伯效应
加速度计
光栅
闭环控制
Talbot effect
accelerometer
grating
closed-loop control
