SEDI新工艺在电子级超纯水制备中的工程应用

EngineeringApplication of SEDI New Process in Electronic Grade Ultrapure Water Preparation

电子级超纯水的水质直接影响产品质量,且需求量巨大。介绍了一种“一级反渗透系统(RO)+超级电去离子(SEDI)”组合的超纯水制备新工艺,该新工艺在主流超纯水制备工艺的基础上,在SEDI装置前端仅用一级RO,进水硬度放宽到5.0 mg/L,SEDI本体电耗仅0.25 kW·h/m^(3)(以产水计),实现了节省初期工程投资、节约土地、减少运行电能消耗及生产高品质超纯水的目的。

The quality of electronic ultrapure water directly affects the product quality,and the demand is huge.A new ultrapure water preparation process with combination of“first reverse osmosis system(RO)+super electrodeionization(SEDI)”is introduced.Based on the mainstream ultrapure water preparation process,the new process adopts only one RO in the front end of SEDI unit.With the feed water hardness been relaxed to 5.0 mg/L and a power consumption of 0.25 kW·h/m^(3)(in terms of produced water)for SEDI,the new process realizes the purpose of saving initial project investment and land,reducing operation power consumption and producing high-quality ultrapure water.