高g值压阻式加速度计设计与仿真

Design and Simulation of High g Piezoresistive Accelerometers

研究了一种具有高灵敏度、小尺寸的四端梁结构的压阻式加速度计。利用有限元软件对不同悬臂梁、质量块尺寸的结构建立模型,并对该结构进行了灵敏度与应力分析、模态分析,以及动态响应分析。仿真研究结果表明,在50 kg量程内,传感器轴向灵敏度达到7.40μV/g,横向灵敏度为0.33%,线性度为0.06%,响应时间为20.3μs,固有频率为111.2 kHz。抗冲击性能能达到334000 g,可以满足高g值环境下的测试需求,同时该研究为研制高性能传感器提供了一种准确且高效的仿真方法。

A four-end beam structure piezoresistive accelerometer with high sensitivity and small size is designed in this paper.The structure with different cantilever beam and mass block sizes is modeled using finite element software,and sensitivity and stress analysis,modal analysis,and dynamic response are performed on the structure.The simulation results show that the axial sensitivity reaches 7.40μV/g,the lateral sensitivity is 0.33%,the linearity is 0.06%,the response time is 20.3μs,and the natural frequency is 111.2 kHz within the 50000 g range.The impact resistance can reach 334000 g,which can satisfy the test needs in a high-g environment,and this research provides an accurate and efficient simulation method for the development of high-performance sensors.