半导体行业含氟污泥酸洗解聚及浮选工艺研究

Study on Acidic Dissociation and Flotation of Fluorine-Containing Sludge in Semiconductor Industry

半导体行业产生的含氟污泥日益增多,其成分复杂且粒度较小,传统方法难以实现资源化。以某半导体企业产生的含氟污泥为研究对象,系统研究了污泥的矿物组成、粒度及微观形貌等矿物学特征。结果表明,前端工艺添加的絮凝剂造成目的矿物氟化钙与杂质团聚成大颗粒,严重影响浮选提纯效果,以盐酸为解聚试剂对污泥进行处理,可有效实现含氟污泥的单体解离。进一步以油酸钠为捕收剂、酸化水玻璃为抑制剂,通过1段粗选、3段精选、3段扫选,最终获得Ca F_(2)品位为84.41%、回收率为75.72%的氟化钙精矿。本研究为半导体行业产生的含氟污泥的分离纯化及资源化利用提供了理论指导及科学依据。

The fluorinated sludge produced in semiconductor industry is increasing rapidly,it is difficult to achieve the utilization of fluorine resource via traditional methods because of complex composition and small particle size.This study systematically investigated the mineral composition,particle size and micro-morphology of fluorinated sludge produced by a semiconductor company.The results showed that the flocculant added in the previous wastewater treatment process agglomerated calcium fluoride and impurities into large particles,which seriously affected flotation effect purification.The acidic dissociation of fluorinated sludge could be effectively achieved by treating the sludge using hydrochloric acid as the depolymerization reagent.The concentrate of calcium fluoride with CaF_(2)grade of 84.41%and recovery of 75.72%was obtained by one stage of roughing,three stages of selecting and three stages of sweeping,using sodium oleate as collector and acidified waterglass as inhibitor.This paper provided theoretical guidance and scientific basis for the separation,purification and resource utilization of fluorinated sludge produced in semiconductor industry.