摘要
基于中国原子能科学研究院钴源建立的器件总剂量辐照装置试验平台,开展了静态随机存储器(SRAM)的总剂量效应研究。分别研究了器件特征工艺尺寸、累积辐照剂量、辐照剂量率以及温度对器件总剂量效应的影响。研究结果表明:在一定范围内剂量率对器件的总剂量效应影响不大,器件特征工艺尺寸越大总剂量效应的影响越大,温度越高总剂量效应影响越弱。此外还测量得到了该总剂量辐照实验平台的典型剂量率分布及均匀性。相关结果为宇航、核工业用电子器件抗辐射加固设计提供了一定的参考。
The effect of the total ionizing dose(TID)on the static random access memory(SRAM)is conducted on the 60Co radioactive source in the China Institute of Atomic Energy.The study explores the influence of the device process size,dose rate,temperature and total dose on TID.The results indicated that within a certain range,the dose rate had little influence on the TID of the device.The larger the characteristic size of the device,the greater TID effect,while the higher temperature,the weaker the total dose effect.In addition,the typical dose rate and the uniformity of the source are achieved.The research of the paper provide an insight into radiation hardening,particularly in the aerospace and the nuclear industries.
作者
张付强
陈启明
龚艺豪
肖舒颜
张铮
马旭
赵树勇
郑宏超
张健鹏
郭刚
ZHANG Fuqiang;CHEN Qiming;GONG Yihao;XIAO Shuyan;ZHANG Zheng;MA Xu;ZHAO Shuyong;ZHENG Hongchao;ZHANG Jianpeng;GUO Gang(National Innovation Center of Radiation Application,China Institute of Atomic Energy,Beijing 102413,China;Beijing Institute of Microelectronics Technology,Beijing 100076,China)
出处
《辐射研究与辐射工艺学报》
CAS
CSCD
2023年第6期108-113,共6页
Journal of Radiation Research and Radiation Processing
关键词
静态随机存储器
总剂量效应
功耗电流
特征尺寸
Static random access memory
Total dose effect
Power supply current
Feature size