空间柔性阵列天线薄膜阵面制造技术研究

Research on Fabrication Technology of Space Flexible Antenna Membrane Array

简要阐述了空间柔性天线的进展,分析了空间柔性天线薄膜阵面制造关键技术。研究了薄膜阵面电磁波传输金属薄膜制备技术、薄膜阵面图形化制造技术、薄膜阵面拼接用材料评价、薄膜阵面的裁切技术等。采用磁控溅射技术,通过溅射功率、走带张力、走带速度的调节,在有机柔性薄膜基材上镀制了不同厚度的金属铜膜,实现了有机柔性薄膜基材的表面金属化;利用飞秒激光刻蚀精度高,不损伤柔性薄膜基材的特点,获得了图形化的金属薄膜阵面单元;对3M92号胶带与改性聚酰亚胺胶接材料的拼接强度与耐高低温性能进行了试验对比,发现改性聚酰亚胺胶接材料的强度与耐高低温性能更好,更适合薄膜阵面的拼接;对比了用纳秒激光和飞秒激光裁切的薄膜微观形貌,结果表明,用飞秒激光裁切的切面光滑,无烧蚀与毛刺,适合于高精度薄膜阵面的制造。研究为空间柔性阵列薄膜天线的制造提供了大量的基础数据。

In recent years,the use of space flexible antennas has attracted more and more attention.However,the fabrication technology of large-area thin film antenna arrays still requires further research.Here we report exploration of key technologies for the preparation of thin-film flexible antennas.Using magnetron sputtering technology,copper films with metallic surface and different thicknesses were deposited on flexible substrates by adjusting the sputtering energy and strip tension and speed.By optimizing the ablation energy of etching femtosecond laser,the patterned array arrangement was realized without damaging the flexible substrate.We found that the modified polyimide has higher splicing strength and better resistance to a temperature at range of-100~100℃compared with the commonly used 3M92 tape,so we believe that the former one has potential in splicing thin film arrays.In addition,the microstructure shows that femtosecond laser cutting can obtain a smoother section compared with nanosecond laser,and there are no burrs and ablations.Our results provide further understanding for the fabrication of space flexible antennas.