融合共焦与变焦测量技术的复杂表面测量方法

Complex surface measurement method incorporating confocal and focus variation measurement techniques

对于复杂多样性的表面,共焦测量法和变焦测量法均只能测量特定的区域信息,不能提供全局的最优测量.针对此问题,基于结构照明显微成像技术,提出了一种融合共焦测量技术与变焦测量技术的复杂表面测量方法.该方法通过建立坐标统一的双模式一体测量显微镜,充分利用了两种测量方法的优点来估算每个测量点处的表面重建置信度值,进而有效地实现了不同表面形貌数据的融合.为了验证该方法的性能,对陡峭台阶表面和复杂纹理的磨削表面进行了一系列试验测试.结果表明:该方法在兼顾共焦测量精度的同时,有效抑制了复杂表面测量结果中存在的噪点和异常点,较好地实现了对陡峭台阶表面和复杂纹理的磨削表面的有效测量.

For complex and diverse surfaces,both confocal and focus variation measurement methods can only capture specific regional information and fail to provide a globally optimal measurement.To address this issue,a complex surface measurement method that integrates confocal and focus variation measurement techniques was proposed.By establishing a coordinate-unified dual-mode integrated measurement microscope,the proposed method maximized the advantages of both measurement methods to estimate surface reconstruction confidence values at each measurement point,and thus effectively integrated different surface topography data.To validate the performance of the proposed method,a series of experimental tests were conducted on steep step surfaces and surfaces with complex textures.Results show that this method simultaneously achieves high measurement accuracy from confocal measurements and effectively suppresses noise and outliers in the measurement results of complex surfaces,enabling effective measurement of steep step surfaces and surfaces with complex textures.