大气压双频Ar/O_(2)放电等离子体特性的数值模拟

Numerical Simulation of the Characteristics of Dual Frequency Ar/O_(2) Discharge Plasma at Atmospheric Pressure

文章采用等离子体流体理论模型,研究了双频容性耦合放电中高频源频率对大气压氩气与氧气混合气体放电等离子体的各类粒子密度与各项等离子体参数的影响。通过模拟不同高频源频率的放电,得到了放电空间中各类粒子的密度、电子温度、电场等参数的一维时空分布,进一步了解了双频放电中高频源频率对等离子体特性的影响作用。研究结果表明:当放电电压固定时,随高频源频率的升高,电子密度逐渐增大;电子温度、电场与电势有下降的趋势;各类氩离子密度与氩原子的亚稳态密度随高频源频率的升高而增大;随高频源频率的升高,各类氧离子密度增大,氧原子密度先减小后增大,氧分子的亚稳态密度先增大后减小。电子压力加热、电子欧姆加热、电子加热和能量损失受高频源频率的影响均逐步升高。此外,有效电流密度与有效功率密度随高频源频率的升高大体增加。

Based on the plasma fluid theory,the effects of high-frequency source frequency in dual frequency capacitive coupling discharge on the various particles’density and plasma parameters of argon oxygen mixture discharge plasma at atmospheric pressure were studied.We simulate the discharge in different high-frequency source frequencies and have achieved the one-dimensional space-time distribution of the various particles’density,electron temperature,electric field and other parameters,and a better understanding of the influence of highfrequency source frequency on plasma characteristics in dual frequency discharge.The results show that when the discharge voltage is fixed,the electron density increases with the increase of the high-frequency source frequency;The electron temperature,electric field and potential have a downward trend;The density of various argon ions and sub argon atoms increases with the increase of high-frequency source frequency;With the increase of highfrequency source frequency,the density of various oxygen ions increases,the density of oxygen atoms decreases first and then increases,and the metastable density of oxygen molecules increases first and then decreases.Electronic pressure heating,electronic ohmic heating,electronic heating and energy loss are gradually increased due to the influence of high-frequency source frequency.In addition,the effective current density and effective power density generally increase with the increase of high-frequency source frequency.