双靶磁控溅射制备Ag-Ti薄膜及其去合金化初探

Preparation of Ag-Ti Films by Double-target Magnetron Sputtering and Pilot Study on Dealloying

采用双靶磁控溅射技术通过调节靶材的溅射功率在表面氧化的Si(100)衬底上制备出了一系列不同Ag含量的Ag-Ti合金薄膜,利用扫描电子显微镜和X射线衍射仪对薄膜的形貌、组成及晶体结构进行了分析,并对Ag-Ti薄膜的去合金化方法进行了初步探究。结果表明:通过低温双靶磁控溅射制备的Ag-Ti合金薄膜处于热力学不稳定状态且具有良好的成分均匀性,并且薄膜的厚度、含银量、晶粒尺寸及结晶度均随着银靶功率的提升而不断增加。此外,本研究首次发现,通过简单的硝酸和过氧化氢溶液处理,能够成功实现Ag-Ti薄膜的去合金化,且产物分别为多层级多孔银膜以及掺银的纳米多孔氧化钛薄膜,因而在表面增强拉曼散射、光催化、医用抗菌等领域具有潜在价值。

A series of Ag-Ti alloy films with different Ag content were prepared on the surface-oxidized Si(100)substrate by using double-target magnetron sputtering technology through adjusting the sputtering power of the target.The morphologies,compositions and crystal structures of the films were analyzed by using scanning electron microscope and X-ray diffractometer,and the dealloying methods of Ag-Ti films was investigated.The results showed that the Ag-Ti alloy films prepared by double-target magnetron sputtering at low temperature were thermodynamically unstable and had good composition homogeneity.The thickness,silver content,grain size and crystallinity of the films increased with the increase of silver target power.In addition,it was found for the first time that through simple nitric acid and hydrogen peroxide treatment,Ag-Ti films could be dealloyed successfully,and the products were multi-layer porous silver films and silver doped nano-porous titanium oxide films respectively,having potential value in the fields of surface-enhanced Raman scattering,photocatalysis,antibiosis,etc.