气浮隔振平台特性测试方法的研究

Research on the Characteristic Test Method of Air-Floating Vibration Isolation Platform

针对气浮隔振平台的振动隔离特性评估,建立隔振平台的力学模型,获得刚度-阻尼并联的两参数模型的传递特性。设计一套微振动测量评估系统,测量流程为:冲击锤激励隔振平台,低频微振动加速度传感器测量地面和隔振台面微小振动加速度值,MI-7208型智能便携式数据采集仪实时采集振动数据,通过配套的专业隔振平台特性分析软件处理得到隔振平台的固有频率和隔振效果等指标。试验结果表明:气浮隔振平台振动衰减可达25 dB;其水平和垂直方向固有频率均在2 Hz附近,与设计参数吻合。

In order to evaluate the vibration isolation characteristics of the air-floating vibration isolation platform,the mechani-cal model of the vibration isolation platform was established,and the transfer characteristics of the stifness-damping parallel two-pa-rameter model were obtained.A measurement and evaluation system for micro-vibration was designed.The measurement process was as follows:the impact hammer was used to excite the vibration isolation platform,the low-frequency micro-vibration acceleration sen-sors were used to measure the micro-vibration accelerations of the ground and the vibration isolation platform,and the MI-7208 intelli-gent portable data acquisition instrument was used to collect the vibration data in real time.The natural frequency and vibration isola-tion effect of the vibration isolation platform were obtained by the supporting professional vibration isolation plaform characteristic anal-ysis software.The test results show that the vibration attenuation of the air-bearing vibration isolation platform can reach 25 dB,and the natural frequencies of the air-bearing vibration isolation platform in both horizontal and vertical directions are around 2 Hz,which are consistent with the design parameters.