摘要
Full-field transmission X-ray microscopy(TXM)is a powerful non-destructive three-dimensional(3D)imaging method with a nanoscale spatial resolution that has been used in most synchrotron facilities worldwide.An in-house-designed TXM system was constructed at the BL18B 3D nanoimaging beamline at the Shanghai Synchrotron Radiation Facility.The beamline operates from 5 to 14 keV and enables 20 nm spatial resolution imaging.The characterization details of the beamline are described in this paper.The performances in terms of spatial resolution,nano-CT,and nano-spectral imaging of the TXM beamline are also presented in this article.
基金
supported by the National Key Research and Development Program of China(Nos.2021YFA1600703,2021YFF0701202,and 2021YFA1601001)
the National Natural Science Foundation of China(Nos.12275343 and U1932205)。
