电子洁净厂房设备站脚高度对气流组织影响研究

Airflow Study of Electronic Cleanroom Based on Numerical Simulation

结合某实际工程,通过计算流体力学(CFD)软件sc STREAM对某洁净厂房进行数值模拟,运用计算流体力学的方法探讨了设备站脚高度对洁净厂房内的气流组织影响。结果表明:设备站脚为0.15m时有助于保障气流的单向流动性,减少涡流的产生。数值模拟的结果可以为洁净厂房的设计提供可行性的建议,从而针对性的提出优化设计方案。

Combined with a practical project,the computational fluid dynamics(CFD)software scSTREAM was used to numerically simulate a clean plant,and the influence of the foot height of the equipment on the airflow structure in the clean plant was discussed by the method of computational fluid dynamics.The results show that when the foot of the equipment is 0.15 m,it helps to ensure the unidirectional fluidity of the airflow and reduce the generation of eddy currents.The results of numerical simulation can provide feasible suggestions for the design of clean plants,so as to propose optimized design solutions.