纳米钼粉制备用高频感应等离子体装置的设计与优化

Design and optimization of high-frequency inductive plasma device for preparation of molybdenum nanopowder

针对制备纳米钼粉的设备普遍存在能耗高和可操作性低的问题,文中设计了一种高频感应等离子体装置,并对多处结构进行了优化。设备使用10 kW电源,具有功率低和体积小的特点;进料器为分离式结构,可以均匀加料且无振动干涉;进料器与反应器用卡套式管接头连接,使用标准零件,连接牢固且成本低;反应器的边气和反应气进口各2个,冷却水进口有3个,进气和冷却都更均匀,冷却范围覆盖整个等离子体区域,可有效避免石英管过热损坏;收集器是双层结构,外层是箱体,内层是过滤网和收集皿,收集皿从箱体底部安装,卸料时打开收集皿底部的卸料孔即可,操作简单方便。

Since the equipment for preparation of molybdenum nanopowder suffers high energy consumption and low operability,in this article efforts are made to design a high-frequency inductive plasma device,and then several parts of its structure are optimized.The device uses 10 kW power supply,with the characteristics of low power and small size.The feeder is a separated structure,which can be uniformly fed without vibration interference.It is connected to the reactor with a tube fitting made of standard parts;the connection is strong and low in cost.The reactor has 2 inlets for side gas and reaction gas,and 3 inlets for cooling water,with more uniform air inlet and cooling;the cooling covers the whole plasma area,thus effectively avoiding overheating and damage to the quartz tubes.The collector is a double-layer structure,with the outer layer as the box while the inner layer as the filter and the collection dish;the collection dish is installed from the box bottom;when unloading,it is necessary to open the unloading hole at the bottom of the collection dish,which is simple and convenient in operation.