电子级硅料清洗质量影响因素分析

Analysis of Influencing Factors on Cleaning Quality ofElectronic Grade Silicon Material

电子级多晶硅中金属杂质含量的控制要求较高,其生产工艺、后处理工艺比较严格。电子级多晶硅料在破碎处理中难免会造成二次金属引入的问题,因此对破碎后的电子级多晶硅料进行清洗显得尤其重要。本文分析了电子级多晶硅料清洗质量的影响因素,包括清洗工艺、清洗剂选择、清洗设备材质及环境洁净度和人为操作因素等,并提出相应的控制措施。

The control requirements of metal impurity content in electronic grade polycrystalline silicon are high,and its production process and post-treatment process are strict.The electronic grade polysilicon material will inevitably cause the problem of secondary metal introduction in the crushing treatment,so it is particularly important to clean the broken electronic grade polysilicon material.This paper analyzed the factors affecting the cleaning quality of electronic grade polysilicon materials,including cleaning process,cleaning agent selection,cleaning equipment material,environmental cleanliness and human operation factors,and put forward corresponding control measures.