摘要
随着物联网的快速发展,各领域对气体监测的需求越来越大,基于先进微机电系统(Micro-electro-mechanical systems, MEMS)技术的金属氧化物半导体(Metal oxide semiconductor, MOS)气体传感器在过去几十年里取得了很大发展。MEMS微热板的多样化设计、MOSs纳米结构的多样化以及机器学习算法的出现为MEMS的传感性能以及智能传感系统的构建提供了很大助力。本文从MEMS气体传感器的分类、制备和应用以及传感器阵列的构建等方面综述了金属氧化物半导体MEMS气体传感器的最新研究进展,并对MEMS基气体传感器的发展前景进行了总结和展望。
With the rapid development of the Internet of things,there is an increasing demand for monitoring volatile organic chemicals in various fields.Metal-oxide semiconductor(MOS)gas sensors based onadvanced micro-electro-mechanical systems(MEMS)technology have significantly developed in the past few decades.The diverse design of micro hot plates,the diversification of MOS nanostructures,and the emergence of machine learning algorithms have promoted the sensing performance of MEMS sensors and their intelligent sensing systems.This paper will summarize the latest advances in the classification,preparation,and application of MEMS gas sensors and the sensor array.Finally,the deve-lopment prospect of MEMS-based gas sensors is summarized.
作者
尹嘉琦
沈文锋
吕大伍
赵京龙
胡鹏飞
宋伟杰
YIN Jiaqi;SHEN Wenfeng;LYU Dawu;ZHAO Jinglong;HU Pengfei;SONG Weijie(School of Materials Science and Engineering,Shanghai University,Shanghai 200444,China;Ningbo Institute of Material Technology&Engineering,Chinese Academy of Sciences,Ningbo 315201,Zhejiang,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Faculty of Materials Metallurgy and Chemistry,Jiangxi University of Science and Technology,Ganzhou 341000,Jiangxi,China)
出处
《材料导报》
EI
CSCD
北大核心
2024年第1期30-43,共14页
Materials Reports
基金
浙江省自然科学基金项目(LGF22F010008)
宁波市自然科学基金项目(202003N4362,202003N4332)。
关键词
气体传感器
金属氧化物半导体
微机电系统
传感器阵列
智能传感系统
gas sensors
metal-oxide semiconductor
micro-electro-mechanical system
sensor array
intelligent sensing system
