WO_(3)敏感电极的制备及其性能研究

Preparation and Properties of WO_(3) Sensitive Electrode

迈向微型化、集成化及具有高选择性和灵敏度的固体电解质气体传感器已成为未来的发展趋势。文章采用磁控溅射法成功制备了WO_(3)气体传感器敏感电极材料,并通过X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线光电子能谱(XPS)等表征手段研究了WO_(3)的结构、成分和形貌并测试了该气体传感器对NO_(2)的气敏性能。XRD结果表明,当退火温度大于400℃时,WO_(3)出现(200)衍射峰,且该衍射峰随退火温度增加而显著增强,表明WO_(3)结晶质量增加。SEM测试结果表明,随着退火温度的升高,薄膜的晶粒尺寸逐渐增大。当退火温度达到500℃时,采用谢乐公式计算其晶粒尺寸达到23 nm。EDS结果表明,退火温度对薄膜的成分也有较大影响,O:W原子比例呈现增大趋势,由2.7增加到3.2,这与XPS结果相符合。通过高温气敏性能测试表明,所制得的WO_(3)敏感电极对NO_(2)表现出了明显的气体响应。本研究为制备微型化、高选择性和灵敏性的固体电解质气体传感器提供了一定的研究基础。

Towards miniaturization,integration and high selectivity and sensitivity of solid electrolyte gas sensors have become the future development trend.In this paper,WO_(3)gas sensor-sensitive electrode materials were successfully prepared by magnetron sputtering.The structure,composition,and morphology of WO_(3)were studied by X-ray diffraction(XRD),scanning electron microscopy(SEM),and X-ray photoelectron spectroscopy(XPS).The XRD results show that when the annealing temperature is greater than 400°C,WO_(3)has a(200)diffraction peak,and with the increase of annealing temperature,the diffraction peak increases significantly,indicating that the crystallization quality of WO_(3)is improved.The SEM test results show that with the increase of annealing temperature,the grain size of the film gradually increases,and when the annealing temperature reaches 500°C,the grain size reaches 23 nm,which is consistent with the calculation result of Scherrer's formula.The EDS results show that the annealing temperature also has a great influence on the composition of the film.The O:W atomic ratio increases from 2.7 to 3.2,which is consistent with the XPS results.The gas sensing performance test at high shows that the prepared WO_(3)sensitive electrode has obvious gas response behavior to NO_(2).This study provides a research basis for the preparation of miniaturized,highly selective and sensitive solid electrolyte gas sensors.