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激光跟踪干涉系统基点的直线约束标定方法

Linear constraint approach for calibrating distance of base point in laser tracking interferometer system
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摘要 激光跟踪干涉系统的测量精度是工业机器人标定精度的主要影响因素,其基点标定精度决定了激光跟踪干涉系统的测量精度。为了确定基点与激光跟踪干涉系统的准确距离,提出了一种激光跟踪干涉系统基点的直线约束标定方法。建立了基于直线约束的数学标定模型,使各标定约束点分布在同一直线上,可直接应用干涉测量方法获取约束点的精确坐标,使用最小二乘法进行数值解析确定基点距离,该方法具有原理简单、误差源少、测量精度高的特性。针对影响标定精度的各项参数进行了数值仿真分析,优化标定参数,减小标定误差;最终搭建了实验装置评估该标定方法的性能,实验结果表明,激光跟踪干涉系统的基点距离平均值为290.0764 mm,标准差为4.4μm,满足对工业机器人标定的精度需求;为验证该方法的准确性,对API radian激光跟踪仪的基点距离进行比对测试,与其标称值相差3μm。 Objective To ensure the high precision of robot operations,it is imperative to calibrate the robot,enhancing its absolute positional accuracy.The most commonly employed method is the distance error model,which requires obtaining distance information between the robot's end-effector and the measurement device.While laser trackers are widely used due to their high accuracy in directly measuring the position information of the end-effector,they are general-purpose and often expensive devices with many features that go unused in the context of robot calibration.To address these concerns,a custom-designed Laser Tracking Interferometer System(LTIS)has been developed for scenarios requiring high accuracy at a lower cost.The LTIS comprises a tracker module and an interferometer module.In this system,a reference point,termed the base point,is essential for measuring absolute distances.All distances measured by the LTIS are referenced to this base point.Consequently,the accuracy of the distance from the LTIS to the base point,known as the Distance of Base Point(DBP),is crucial as it directly influences the overall accuracy of the LTIS.Designing a high-accuracy calibration method for the DBP is essential for achieving precise and cost-effective robot calibration in various applications.Methods The present study introduces a novel method for calibrating the Distance of Base Point(DBP)in a LTIS using a linear constraint approach.As only the DBP is needed in robot calibration,the outgoing light of the laser interferometer is employed as the x-axis to establish the coordinate system(Fig.2).The constraint points utilized for DBP calibration are situated on the line defined by the x-axis.The least square method is then applied to calculate the DBP.The optimal parameters for this calibration method are determined through a combination of theoretical analyses and simulations(Fig.3 and Fig.4).Finally,the proposed method is applied to calibrate the LTIS and obtain its DBP(Fig.5).To validate the calibration result,the DBP of the API radian tracker is calibrated and compared with the normal value(Fig.6).Results and Discussions The number and distribution of constraint points,as well as the layout of the calibration system,can significantly influence the calibration results,as indicated by theoretical analyses and simulations.The analysis results suggest that the constraint points used for calibration should be evenly and equidistantly distributed on the constrained line around the laser tracking system.Furthermore,the constraint points should be dispersed as widely as possible along the constrained line to ensure that the distances li measured by the LTIS exhibit noticeable differences,thereby reducing calibration errors.Optimal calibration parameters were determined through simulation experiments and actual experimental conditions.The constraint line was set to 3400 mm,with 20 constraint points evenly and equidistantly placed on the x-axis,symmetrically positioned around the LTIS.Conclusions In the DBP calibration method for laser tracking interferometry based on the linear constraint approach,all constraint points used for calibration are distributed along a line.The interferometer measures the displacement of the target mirror along the linear direction to obtain the coordinate of the constraint point.Simultaneously,the LTIS measures the change in distance between the target mirror and the base point.The least squares principle is then employed to calculate the DBP.The weighted average DBP in the LTIS is found to be 290.0764 mm,with a standard deviation of 4.4μm.To validate this result,the DBP of an API radian laser tracker was calibrated using this method.The measured DBP of the API radian is 154.1940 mm,with an error of 3μm compared to the normal value.The API radian,which has an accuracy of 10μm+5μm/m in space,demonstrates that the linear constraint approach for calibrating the DBP in the Laser Tracking Interferometer System meets the requirements of robot calibration.This method holds significant importance for the industrial robot industry.
作者 晁祥璋 刁晓飞 康岩辉 范芯蕊 雷李华 刘丽琴 Chao Xiangzhang;Diao Xiaofei;Kang Yanhui;Fan Xinrui;Lei Lihua;Liu Liqin(Division of Dimensional Metrology,National Institute of Metrology,Beijing 100029,China;Institute of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China;Shanghai Key Laboratory of Online Test and Control Technology,Shanghai 201203,China)
出处 《红外与激光工程》 EI CSCD 北大核心 2023年第12期103-110,共8页 Infrared and Laser Engineering
基金 中国计量科学研究院基本科研业务费重点领域项目(AKYZD2109) 上海市自然科学基金项目(21ZR1483100) 上海市优秀学术/技术带头人计划项目(21XD1425000)。
关键词 激光跟踪干涉系统 基点距离标定 直线约束 最小二乘法 laser tracking interferometer system nase point calibration linear constraint least square method
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