专业仿真软件在半导体器件物理课程改革中的应用

Application on Professional Simulation Software in the Curriculum Reform of Semiconductor Devices

半导体器件物理及其相关课程已成为应用物理学专业和电子信息类专业高年级本科生和研究生的必修课程.课程教学内容是从事半导体器件设计、制造和应用等方面工作和研究所必需的专业知识.此课程在建设教学-研究型大学的学生培养课程设计中具有代表性作用.本文选取本课程的部分重难点为实例采用Silvaco软件进行仿真,得到的仿真结果与教材给出的结论一致性非常高,说明此专业仿真软件Silvaco可用于课程教学中.将专业仿真软件与课程相结合,不仅可以更形象地解释物理参数,提高教师授课效果,更能使学生通过理论与应用的联系,明确学习的目的,提高学习兴趣,加强对专业知识的重视.

Semiconductor device physics and its related courses have become a compulsory course for senior undergraduates and researchers of applied physics and electronic information majors.This course is designed to provide the professional knowledge for the design,manufacture and application of semiconductor devices.This course plays a representative role in the design of student training courses in the construction of teaching-research universities.A part of the important and difficult points of this course have been choose as silvaco simulation examples.The obtained simulation results are consistent with the conclusions given in the textbook,which shows that this professional simulation software can be used in the teaching of the course.Combining the professional simulation software with the course can not only explain the physical parameters more vividly and improve the teaching effect of teachers,but also make students clear the purpose of learning,improve their interest in learning and strengthen their attention to professional knowledge through the connection between theory and application.