熔融石英玻璃飞秒激光微纳加工研究

Research of femtosecond laser micronano processing of fused quartz glass

熔融石英玻璃因具有耐热性高、热膨胀系数低、绝缘性能好等优点,广泛应用于航空航天、微光学元件、军事等领域,并对其加工精度和表面质量提出了更高的要求。由于飞秒激光具有“冷加工”的特点,因此在熔融石英玻璃微纳加工方面展现出独特优势。采用波长为1030nm、重复频率为100kHz、脉宽为290fs的飞秒激光对熔融石英玻璃进行加工,确定了不同物镜下熔融石英玻璃的损伤阈值,研究了不同物镜下的激光功率、扫描速度、离焦量、扫描次数对加工线槽的影响,使用逐层叠加加工的方法在低功率下得到了高深宽比(4∶1)的线槽,并且提高加工线槽的宽度与深度的可控性,可以在较薄熔融石英玻璃(200μm)上进行微纳加工。

Fused quartz glass is widely used in aerospace,microoptical components,military and other fields because of its high heat resistance,low thermal expansion coefficient,good insulation properties,and so on.Higher requirements are put forward for its machining precision and surface quality.Because femtosecond laser has the characteristic of"cold processing",it has shown unique advantages in the micro-nano processing of fused quartz glass.Fused quartz glass was processed by femtosecond laser with wavelength of 1030nm,repetition frequency of 100kHz and pulse width of 290fs.The damage threshold of fused quartz glass under different objective lenses was determined.The effects of laser power,scanning speed,defocus and scanning times under different objective lenses on the machining line groove were studied.With the method of layer-by-layer superposition machining,the groove with the ratio of height to width(4:1)was obtained at low power,and the width and depth of the groove were improved,and the micro-nano machining could be carried out on the thinner fused quartz glass(200μm).