电子特气中痕量水溶性杂质的捕集方法研究

Study on the Capturing Method of Trace Water⁃soluble Impurities in Electronic Specialty Gas

配制系列离子浓度标准溶液,使用离子色谱绘制了液相NH+4的校准曲线,作为气体吸收实验的定量依据。使用自制气体吸收装置和标准气体进行气体吸收实验,确定了吸收液种类、吸收瓶材质。通过正交实验考察了吸收速率、吸收时间、吸收液体积和吸收瓶规格4个参数对捕集效率的影响,选出最优参数。通过气体稀释仪,绘制了不同浓度下氢中NH+4的气体响应校准曲线,线性良好。确定了气体吸收的检出限,远高于市场检测需求。所进行的吸收参数等的考察为我国集成电路基础材料检测的发展提供了有利的技术支撑。

Standard solutions of serial ion concentrations were prepared and the calibration curve of liquid phase NH+4 was plotted using ion chromatography as a quantitative basis for gas absorption experiments.The self⁃made gas absorption device and the standard gas were used in the gas absorption experiment,and the type of the absorption liquid and the absorption bottle material were determined.The influence of four parameters,the absorption rate,the absorption time,the absorption liquid volume,and the absorption bottle specification,were investigated by orthogonal experiments,and the optimal param⁃eters were selected.Through the gas dilution,the gas response calibration curve of NH+4 in hydrogen at different concentra⁃tions was made,with good linearity.The detection limit of gas absorption was determined,which was far better than the market detection demand.The investigation of absorpiion parameters provides favorable technical support for the develop⁃ment of integrated circuit basic material detection in China.