摘要
This paper presents a surface acoustic wave(SAW)sensor based on coplanar integrated Langasite(LGS)that is fabricated using wet etching,high-temperature bonding,and ion beam etching(IBE)processes.The miniaturized multiparameter temperature‒pressure-humidity(TPH)sensor used the MXene@MoS2@Go(MMG)composite to widen the humidity detection range and improve the humidity sensitivity,including a fast response time(3.18 s)and recovery time(0.94 s).The TPH sensor was shown to operate steadily between 25–700°C,0–700 kPa,and 10–98%RH.Coupling issues among multiple parameters in complex environments were addressed by decoupling theΔf-temperature coupling factor to improve the accuracy.Therefore,this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.
基金
supported by the National Natural Science Foundation of China(No.U1837209)
Key Research and Development Plan of Shanxi Province under Grant(202102030201005)
the Outstanding Young Talents Support Plan of Shanxi Province,the Young Sanjin Scholar Distinguished Professor Plan of Shanxi Province,the Innovative Research Group Project of National Natural Science Foundation of China(No.51821003)
the Shanxi“1331 project”key subjects Construction,and in part by National Key R&D Program of China(No.2018YFB2002503).
