直线电机高速高精运动分段式三元复合控制

Segmented Ternary Composite Control Method for High Speed and High Precision Motion of Linear Motor

针对半导体键合机XY运动平台的直线电机在高速启停运动时残余振动较大的问题,提出了一种分段式三元复合控制方法以提高直线电机的定位精度。首先,基于正弦扫频的方法建立了直线电机被控对象的高阶精确模型;其次,在直线电机的高速运动阶段采用三阶前馈控制与PID反馈控制结合的复合控制方法,实现了高动态响应;分析了高速运动状态下扰动观测器对动态性能的影响,在定位阶段引入高阶扰动观测器以抑制残余振动。实验结果表明,与传统的“前馈+反馈”复合控制方法相比,分段式三元复合控制方法在不影响直线电机动态跟踪性能的情况下,使其定位误差调整至±0.5μm所需的时间降低了89%以上,显著提高了其定位精度。

A segmented ternary composite control method is proposed in this paper to improve the positioning accuracy of linear motor on semiconductor bonding machine XY motion stage with high residual vibration during high-speed start-stop motion.Firstly,a high-order accurate model of the controlled object of the linear motor is established based on a sinusoidal sweep method.Secondly,a composite control method combining third-order feedforward control and PID feedback control is used in the high-speed motion phase of the linear motor to achieve high dynamic response;the influence of the disturbance observer on the dynamic performance in the high-speed motion state is analyzed,and a high-order disturbance observer is introduced in the settling period to suppress residual vibration.The experimental results show that,compared with the convertional"feedforward+feedback"composite control method,the segmented ternary composite control method reduces the time required to adjust the positioning error to±0.5μm by more than 89%without affecting the dynamic tracking performance of the linear motor,significantly improving its positioning accuracy.