摘要
该工程项目为微波、毫米波多芯片组件研制车间工程。为满足组件的高性能、高可靠性等技术要求,组件的装配环境是必须前提,必须建造万级超净车间。项目针对现有建筑的特点进行改造,运用温湿度独立控制系统(THIC)技术、下更换式风机过滤单元(FFU)安装技术、洁净实验室全自动化控制系统等技术,设计并建成1 000 m^(2)超净智能车间。可为类似工程设计提供一定的指导作用。
This project is a microwave and millimeter wave multi-chip module development workshop project.In order to meet the technical requirements of high performance and high reliability of components,the assembly environment of components is a necessary prerequisite,and a Class 10,000 super-clean workshop must be built.According to the characteristics of existing buildings,the project uses temperature and humidity independent control system(THIC)technology,down-replacement fan filter unit(FFU)installation technology,clean laboratory automatic control system and other technologies to design and build a 1000-square-meter super-clean smart workshop,which can provide some guidance for similar engineering design.
出处
《科技创新与应用》
2024年第4期110-114,118,共6页
Technology Innovation and Application
关键词
微波组件
超净车间
空调系统
温度
湿度
洁净度
microwave module
super clean workshop
air conditioning system
temperature
humidity
cleanliness