纳米双金属多层膜力学行为的研究进展

Progress in Research on the Mechanical Behavior of Nanostructured Bimetal Multilayers

纳米双金属多层膜是由2种金属按照一定的调制周期交替沉积而形成的一种层状薄膜材料,凭借着特殊的结构和优异的物理、化学和力学性能,在微机电系统、机械加工以及微电子器件等领域有着广泛的应用潜力,被国内外学者广泛关注和研究。针对近年来纳米金属多层膜力学行为的研究现状,围绕纳米金属多层膜的微观结构、力学性能及其内在塑性变形机制3个方面进行了综述。总结了纳米金属多层膜中的晶粒尺寸、孪晶以及异质界面等微观结构,分析了这些因素对其力学性能的影响,阐述了力学性能和塑性变形的尺寸效应,介绍了兼具良好强度和塑性的纳米金属多层膜设计策略,可通过控制多层膜的调制周期和引入合适的界面结构制备具有高强度/塑性的纳米金属多层膜,讨论了影响纳米金属多层膜塑性变形的内禀机制及主要影响因素。最后,对纳米金属多层膜未来的发展方向进行了分析和展望。

Nanostructured metallic multilayers are a type of layered thin film material composed of two or more metals by alternating deposition.They are deposited in a specific pattern which creates a layered structure.With their special structure and excellent physical,chemical and mechanical properties,they are applicable in various fields,such as micro-electro-mechanical systems,machining,and microelectronic devices.As a result,they have garnered significant attention and research from researchers worldwide.This review aims to provide an overview of recent research progress on the mechanical behavior of nanostructured metallic multilayers.It specifically focuses on three key aspects:microstructural characteristics,mechanical properties,and inherent plastic deformation mechanisms.The microstructure characteristics of grain size,twins and heterogeneous interfaces in nanostructured metallic multilayers,and their effects on mechanical properties are analyzed.The size effects on the mechanical properties,plastic deformation of nanostructured metallic multilayers and the design strategies for high strength and ductility are discussed.Nanostructured metallic multilayers with high strength/ductility can be achieved by controlling the modulation period of the multilayers and introducing suitable interface structures.The intrinsic mechanisms and main influencing factors affecting the plastic deformation of nanostructured metallic multilayers are discussed.At last,