MIM波导结构耦合椭圆八字形谐振腔的折射率传感器

Refractive index sensor with MIM waveguide structure coupled elliptical octagonal resonant cavity

为了进一步提高光学折射率传感器灵敏度,设计了一种金属-介质-金属(MIM)波导结构耦合椭圆八字形谐振腔的折射率传感器。首先,理论分析了该传感结构的原理及关键性能指标;然后,使用有限元分析仿真软件构建了仿真结构,研究其传感性能。仿真结果表明:当a=540 nm、b=340 nm、g=10 nm、l=70 nm时,所设计的传感器的灵敏度可以达到1323 nm/RIU,对应的品质因数可以达到16。

In order to improve the sensitivity of optical index sensor,a metal-medium-metal(MIM)waveguide coupled elliptic eight shape cavity is designed.Firstly,the principle and key performance index of the sensor structure are analyzed theoretically.Then,the simulation structure is constructed by using finite element analysis simulation software to study its sensing performance.The simulation results show that when a=540 nm,b=340 nm,g=10 nm,l=70 nm,the sensitivity of the designed sensor can reach 1323 nm/RIU,and the corresponding quality factor can reach 16.