氧化型VCSELs的可靠性及失效分析

Reliability and failure analysis of oxide VCSELs

为了研究氧化型垂直腔表面发射激光器(VCSELs)的可靠性寿命模型和失效模式,对含有AlGaAs/GaAs量子阱的氧化型VCSELs进行了不同应力条件的老化实验,使用外推函数求得VCSELs的失效寿命,进而求得了不同应力条件下的中值寿命,并结合VCSELs的结温获得准确的寿命模型。最后,采用透射电子显微镜(TEM)分析了氧化型VCSELs的主要失效特征和原因。测试与试验结果表明:含有AlGaAs/GaAs量子阱的氧化型VCSELs的寿命模型参数激活能为0.55 eV,电流加速因子为2.01;氧化型VCSELs失效原因主要与具有内在应力的氧化层相关。

In order to study the reliability lifetime model and failure mode of oxidized vertical cavity surface-emitting lasers(VCSELs),aging experiments are performed on oxidized VCSELs containing AlGaAs/GaAs quantum wells under different stress conditions.The failure lifetime of VCSELs under different stress conditions is obtained using extrinsic function,and then the median lifetime under different stress conditions is obtained.Combined with the junction temperature of VCSELs,an accurate lifetime model is obtained.Finally,the main failure characteristics and causes of oxidized VCSELs are analyzed by transmission electron microscopy(TEM).The test results show that the lifetime model parameter activation energy of oxidized VCSELs containing AlGaAs/GaAs quantum wells is 0.55 eV and the current acceleration factor is 2.01.The failure reason of oxidized VCSELs is mainly related to the oxide layer with internal stress.