等螺距螺杆真空泵内气体流动的数值模拟研究

Numerical Simulation of Gas Flow in a Fixed Pitch Screw V acuum Pump

应用计算流体力学(CFD)方法对螺杆干式真空泵进行数值模拟计算,建立了针对螺杆干式真空泵流场的分析方法。对泵腔中流动区域进行三维建模,采用SCORG和ANSYS-ICEM软件对转动域和固定域分别进行了网格划分,利用瞬态模拟方法得到了泵内压力场、速度场和温度场的分布情况,并计算出抽气速率等参数。网格无关性分析结果与理论数据对比表明数值模拟结果可靠,符合预期。

The computational fluid dynamics(CFD)method was used to simulate the screw dry vacuum pump by numerical simulation and calculation,and the analysis method for the flow field of screw dry vacuum pump was established.The flow area in the pump chamber was modeled in 3D,and the rotating and fixed domains were meshed separately with SCORG and ANSYS-ICEM softwares.The transient simulation method was used to obtain the distribution of pressure field,speed field and temperature field in the pump,and the parameters such as pumping rate were calculated.Perform mesh agnostic analysis was carried out,and the comparison between analysis results and the theoretical data shows that the numerical simulation results are reliable and in line with expectations.