摘要
采用射频磁控共溅射法在叉指电极上制备了ZnO/SnO_(2)n-n异质结复合薄膜,系统测试了其气敏特性,并分析了其气敏机理。结果表明,与ZnO薄膜和SnO_(2)薄膜气体传感器相比,ZnO/SnO_(2)异质结薄膜气体传感器具有更低的工作温度、更高的灵敏度以及更快的响应和恢复速度。ZnO/SnO_(2)异质结薄膜气体传感器对乙醇具有较好的选择性,最低检测体积分数为1×10^(-6),最佳工作温度为250℃;对1×10^(-4)乙醇气体的灵敏度可达18.4,响应时间和恢复时间分别为10 s和19 s。
ZnO/SnO_(2) heterojunction composite film is prepared on interdigital electrodes by radio frequency magnetron co-sputtering method.The gas-sensitive performance is tested,and gas-sensitive mechanism is analyzed.The results show that compared with ZnO film and SnO_(2) film-based gas sensors,the ZnO/SnO_(2) heterojunction composite film-based gas sensor exhibits lower working temperature,higher sensitivity,and faster response and recovery rates.The ZnO/SnO_(2) heterojunction composite film-based gas sensor shows good selectivity towards ethanol with a detection limit of 1×10^(-6) and an optimum working temperature of 250℃;the sensitivity of the gas sensor towards 1×10^(-4) ethanol gas is 18.4,and the response time and recovery times are 10 s and 19 s,respectively.
作者
孙士斌
张叶裕
高晨阳
常雪婷
SUN Shibin;ZHANG Yeyu;GAO Chenyang;CHANG Xueting(School of Logistics Engineering,Shanghai Maritime University,Shanghai 201306,China;School of Ocean Science and Engineering,Shanghai Maritime University,Shanghai 201306,China)
出处
《传感器与微系统》
CSCD
北大核心
2024年第2期61-64,共4页
Transducer and Microsystem Technologies
